PURPOSE: To select a sample wherein the inspection of the deviation angle of the cut surface thereof is completed corresponding to the deviation angle in a state holding a predetermined direction.

CONSTITUTION: Only samples held to an accurate posture in a sample arranging part 10 are sent to an arranging table 13 and the sample at the leading end of the arranging table 13 is sucked by the vacuum chuck 24 of a sample supply robot 20 to be placed on a sample table 36. The deviation angle of the cut surface of the sample is measured by an X-ray optical system and the inspected sample is sucked by the vacuum chuck 44 of a sample discharge robot 40 to be sent to a sample selecting and receiving part 50 to be received in a receiving box 51 corresponding to the deviation angle thereof. The sample is moved in a state held in its direction when it is sent from the sample table 36 to the receiving box 51 and stacked in the receiving box 51 in a directionally arranged state.