PURPOSE: To make it possible to simultaneously measure the fluorescence intensity and the life of a sample at a high speed by obtaining the phases of the light beams emitted from a light source at a plurality of measuring points and the phase difference of the output signals from a high speed photodetector, and performing analysis and processing.
CONSTITUTION: A light source 12 whose light intensity is modulated is used, and a sample 10 is excited. The phase of the light from the light source 12 and the phase difference of the output signals of a high speed photodetector 20 are obtained in a phase comparator 21. The measuring position of the sample is moved with an X-Y stage 16. The phase difference at each measuring point is analyzed and processed. The space intensity and the life of photoluminescence or the correlation distributions of said distributions are obtained. Therefore, the fluorescence intensity and the life can be measured at the same time at a high speed. The quality of a GaAs wafer and the like can be accurately evaluated. Furthermore, local defects and the like can be readily inspected.
WATANABE MOTOYUKI
SUGA HIROBUMI
MIZUSHIMA YOSHIHIKO
| JPS63312649A | 1988-12-21 | |||
| JPS63298211A | 1988-12-06 | |||
| JPS4943226A | 1974-04-23 |
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