Title:
APPARATUS FOR MANUFACTURE OF SEMICONDUCTOR
Document Type and Number:
Japanese Patent JPH04171898
Kind Code:
A
Abstract:
PURPOSE: To facilitate positioning and carriage of semiconductor elements by installing a base which has truncated pyramid guide holes opened upward and can locate the semiconductor elements, dropped from above, by their tare.
CONSTITUTION: A semiconductor element 8 sucked by a vacuum chuck 7 is fitted to the middle of a truncated guide hole 1 and the vacuum is cancelled. The semiconductor element 8 is separated from the vacuum chuck 7 and falls along the sidewall of the truncated guide hole 1. The next truncated guide hole 1 is moved by rotating the pulse motor 6 of a semiconductor manufacture apparatus. By repeating that operation, semiconductor elements 8 can be fitted one after another.
Inventors:
SUZUKI TOSHIAKI
TANAKA SHOICHI
TOMOTA HIDEHIKO
TANAKA SHOICHI
TOMOTA HIDEHIKO
Application Number:
JP30085190A
Publication Date:
June 19, 1992
Filing Date:
November 05, 1990
Export Citation:
Assignee:
MATSUSHITA ELECTRONICS CORP
International Classes:
H05K13/02; (IPC1-7): H05K13/02
Attorney, Agent or Firm:
Akira Kobiji (2 outside)