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Patent Searching and Data


Title:
APPARATUS FOR MEASURING ASPHERICAL SHAPE
Document Type and Number:
Japanese Patent JPH10221031
Kind Code:
A
Abstract:

To provide an apparatus for measuring aspherical shape which can measure an aspherical shape highly accurately.

Measured face shape data D2 obtained from interference fringes due to mutual interference of reference light and measuring light obtained by reflection on a face to be inspected when a lens 13 to be inspected is held by a holding mechanism 3, reflector standard face shape data D1 obtained from interference fringes due to mutual interference of the reference light and the measuring light obtained by reflection on a reflector standard face when a reflector standard 12 is held by the holding mechanism 3, and relative deviation L in position of the face to be inspected held by the holding mechanism 3 and the reflector standard face which is obtained via positions measured by a detector 7 are obtained, and also a shape R of the reflector standard face and a constant (h) are further used, thereby calculating a shape of the face to be inspected 'W=(D2-D1)+R+h×L'.


Inventors:
ICHIKAWA HAJIME
Application Number:
JP2061097A
Publication Date:
August 21, 1998
Filing Date:
February 03, 1997
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G01B9/02; G01B11/24; G01M11/00; (IPC1-7): G01B11/24; G01B9/02; G01M11/00
Attorney, Agent or Firm:
Fuyuki Nagai