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Patent Searching and Data


Title:
APPARATUS FOR MEASURING LAYERED FINE STRUCTURE
Document Type and Number:
Japanese Patent JPH11326183
Kind Code:
A
Abstract:

To easily and correctly measure a sample such as nails, pulled teeth, etc., by an OCT.

A layered fine structure of a sample S is measured by an apparatus according to interferometric method using a low interference light, whereby a low coherent light is brought into the sample S and a reference mirror, and an interference signal between the light reflected or scattered from the sample S and the light reflected from the reference mirror is measured. The apparatus is provided with a sample stage 1 a set face of which for the sample S is rotatably arranged to a horizontal plane, a probe 1 for sending the low coherent light to the sample S, and a probe position adjustment means 20 for adjusting a position in an X axis, a Y axis or a Z axis direction of the probe 1.


Inventors:
TSUGITA TETSUYA
KAWAAI MIZUE
Application Number:
JP15852898A
Publication Date:
November 26, 1999
Filing Date:
May 21, 1998
Export Citation:
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Assignee:
KAO CORP
International Classes:
G01B11/24; A61B5/00; A61B5/11; A61B10/00; G01N21/17; G01N21/47; (IPC1-7): G01N21/17; A61B5/00; A61B5/11; G01B11/24
Attorney, Agent or Firm:
Noboru Tajime (1 person outside)