Title:
APPARATUS FOR MEASURING PHASE MATTER
Document Type and Number:
Japanese Patent JP3441292
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To enable measurement of high accuracy and high resolving power even if the refractive index difference of phase matter is large by simultaneously measuring Mach-Zehnder interference and shearing interference by the coherence light from the same light source and to reduce the disturbance of a transmission wave surface by optical elements by reducing the number of optical elements.
SOLUTION: The laser beam emitted from a laser beam source 1 is separated into reference waves (a) and waves (b) to be inspected by a beam splitter BS1 and the waves (b) to be inspected pass through matter A to be inspected to be split into transmitted waves and reflecting waves by the BS2. The reflecting waves are superposed on the reference waves (a) passed through a minutely displaceable high reflecting mirror 9 in a BS3 to be measured as Mach-Zehnder interference by a detector 15. The transmitted waves are split in light path by a shearing generating part 80 to be measured as shearing interference by a detector 75. If the BS1 and the BS3 are replaced with polarizing beam splitters, interference contrast or the like is further enhanced. Computer tomography analysis by the rotation of waves to be inspected is also possible.
Inventors:
Tomoko Nakase
Application Number:
JP8777196A
Publication Date:
August 25, 2003
Filing Date:
April 10, 1996
Export Citation:
Assignee:
株式会社リコー
International Classes:
G01M11/02; G01B9/02; (IPC1-7): G01M11/02; G01B9/02
Domestic Patent References:
| JP9257591A | ||||
| JP2132310A |
Attorney, Agent or Firm:
Yoshiyuki Ishibashi