Title:
APPARATUS AND METHOD FOR CONTROLLING PRECURSOR FLOW
Document Type and Number:
Japanese Patent JP2023123606
Kind Code:
A
Abstract:
To provide an apparatus for detecting the end of the life of an ampoule and controlling precursor flow.SOLUTION: Provided is an apparatus for controlling precursor flow, including: an ampoule to output a precursor; a sensor assembly communicatively coupled to the ampoule and including a sensor; a control system arranged to determine a precursor flux value using the detector during precursor flow through a cell, the control system comprising: a temperature control processor configured to determine an error value on the basis of the precursor flux value, determine a temperature adjustment ΔT on the basis of the error value, and calculate a new set of temperature set points to be applied to the ampoule; and an end-of-life processor configured to check an end-of-life status of the ampoule when the new set of temperature setpoints is not within the current set of temperature limits for the ampoule.SELECTED DRAWING: Figure 8
Inventors:
ELAINA BABAYAN
SARAH WHITE
VIJAY VENUGOPAL
JONATHAN BAKKE
SARAH WHITE
VIJAY VENUGOPAL
JONATHAN BAKKE
Application Number:
JP2023100063A
Publication Date:
September 05, 2023
Filing Date:
June 19, 2023
Export Citation:
Assignee:
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
International Classes:
C23C16/448; B01J4/00
Attorney, Agent or Firm:
Kenji Sugimura
Mitsutsugu Sugimura
Masaaki Ishikawa
Mitsutsugu Sugimura
Masaaki Ishikawa