Title:
多層膜形成体の評価装置および評価方法
Document Type and Number:
Japanese Patent JP7300332
Kind Code:
B2
Abstract:
To provide an evaluation device and an evaluation method for a photoreceptor that can evaluate a film thickness etc., of a multilayer film formed on the photoreceptor (multilayer forming body) simultaneously with high precision through a small number of measuring operations.SOLUTION: An evaluation device for a photoreceptor comprises: a photoreceptor fitting part which is fitted with the photoreceptor movably in a predetermined direction; a spectrophotometer which consists of a light source for irradiating a surface of the photoreceptor with light having a predetermined wavelength width and an optical detector for receiving reflected light and then outputting a light reception signal corresponding to light reception intensity of the reflected light; a spectrum calculation part which acquires light reception intensity for a predetermined number of wavelengths from the light reception signal and then setting the acquired light reception intensity as input information; a storage part which stores a conversion matrix indicative of relation between the input information and a plurality of characteristic values of the photoreceptor; and an output information calculation part which calculates output information consisting of the plurality of characteristic values of the photoreceptor through matrix calculation using the set input information and conversion matrix.SELECTED DRAWING: Figure 7
Inventors:
Shintaro Miyanishi
Rikiya Matsuo
Kimiki Baba
Tatsuhiro Morita
Rikiya Matsuo
Kimiki Baba
Tatsuhiro Morita
Application Number:
JP2019125287A
Publication Date:
June 29, 2023
Filing Date:
July 04, 2019
Export Citation:
Assignee:
Sharp Corporation
International Classes:
G01N21/27; G03G5/00; G03G5/04; G03G5/047; G03G5/05; G03G5/14
Domestic Patent References:
| JP9106218A | ||||
| JP2013040813A | ||||
| JP11051618A |
Foreign References:
| US20030147070 |
Attorney, Agent or Firm:
Nobuhisa Nogawa
Shintaro Nogawa
Shinji Kai
Yusuke Kaneko
Kiyoshi Inamoto
Masami Tomita
Shintaro Nogawa
Shinji Kai
Yusuke Kaneko
Kiyoshi Inamoto
Masami Tomita