APPARATUS AND METHOD FOR ISOLATING CONTAMINANT BY USE OF EXOTHERMIC REACTION STRUCTURE

Title:

APPARATUS AND METHOD FOR ISOLATING CONTAMINANT BY USE OF EXOTHERMIC REACTION STRUCTURE

Document Type and Number:

Japanese Patent JP2004096111

Kind Code:

A

Abstract:

To provide an apparatus and a method for elongating the service life of a sealed part by isolating contaminants contained in a hermetic vessel without causing damage to circuit elements in the hermetic vessel, and by protecting the sealed part against corrosion caused by oxidation inside the hermetic vessel.

It is the method of isolating contaminants. The device which is used for isolating the contaminants (430) includes an exothermic reaction structure (220) arranged inside the hermetic vessel (110). The surface (230) of the exothermic reaction structure (220) is covered with an absorbing agent (210). The absorbing agent (210) reacts on the contaminants (430) contained in the atmosphere of the hermetic vessel (110) when the absorbing agent (210) is exposed to heat created by an exothermic alloying reaction inside the exothermic reaction structure (220). Therefore, the contaminants (430) are isolated inside the hermetic vessel (110).

Inventors:

SIMON JONATHAN

Application Number:

JP2003305661A

Publication Date:

March 25, 2004

Filing Date:

August 29, 2003

Export Citation:

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Assignee:

AGILENT TECHNOLOGIES INC

International Classes:

B01J20/02; H01J7/18; H01L23/26; (IPC1-7): H01L23/26; B01J20/02

Attorney, Agent or Firm:

Satoshi Furuya
Takahiko Mizobe
Kiyoharu Nishiyama

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