Title:
APPARATUS FOR PLASMA TREATMENT AT LOW TEMPEBATURE
Document Type and Number:
Japanese Patent JPS5275985
Kind Code:
A
Inventors:
KAWAMURA KATSUFUMI
UEHARA AKIRA
KOJIMA KENICHI
NAKANE HISASHI
UEHARA AKIRA
KOJIMA KENICHI
NAKANE HISASHI
Application Number:
JP15297775A
Publication Date:
June 25, 1977
Filing Date:
December 22, 1975
Export Citation:
Assignee:
TOKYO OUKA KOUGIYOU KK
OOKA INSUTSURUMENTO KK
OOKA INSUTSURUMENTO KK
International Classes:
G03F7/00; B41N1/00; H01L21/302; H01L21/3065; (IPC1-7): B41N1/00; H01L21/302
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