Title:
APPARATUS FOR POSITIONING INCLINING ANGLE
Document Type and Number:
Japanese Patent JP3299359
Kind Code:
B2
Abstract:
PURPOSE: To easily adjust an inclining angle and an inclining direction by hands without hardly generating errors in a compact structure and also in a short time automatically.
CONSTITUTION: In a first feature of the apparatus, a stage 29 is supported at one point by 28 so that the stage 29 is freely inclined about a fulcrum of the point, while two other points of the stage 29 are supported by two retractable members 30a, 31a which can change a supporting height for the stage 29, and driving means 30, 31 for moving the retractable members 30a, 31a individually are provided. In a second feature, there are provided means 36 for measuring interference fringes when an object 25 on the stage 29 an inclining angle of which is to be set is photographed, means 37 for operating a necessary retreating amount of each of the retractable members 30a, 31a so as to set the object 25 at a predetermined inclining angle and a predetermined inclining direction based on the measured data, and a control means 38 for driving the driving means 30, 31 in accordance with the operating result.
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Inventors:
Toshi Kitada
Yoshio Kaneda
Masatoshi Sakai
Ishimaru Yukihisa
Yoshio Kaneda
Masatoshi Sakai
Ishimaru Yukihisa
Application Number:
JP28787293A
Publication Date:
July 08, 2002
Filing Date:
November 17, 1993
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
G01B5/00; G01B11/26; G05D3/12; H05K13/04; (IPC1-7): G01B11/26; G01B5/00; G05D3/12
Domestic Patent References:
| JP62274201A | ||||
| JP333609A | ||||
| JP63235806A | ||||
| JP210427U |
Attorney, Agent or Firm:
Masaru Ishihara