To provide an apparatus and process for large scale inline manufacturing of CdTe photovoltaic modules in which all steps, including rapid substrate heating, deposition of CdS, deposition of CdTe, CdCl
A p+ ohmic contact region is formed by subliming a metal salt onto a CdTe layer. A back electrode is formed by way of a low cost spray process, and module scribing is performed by means of abrasive blasting or mechanical brushing through a mask. A vacuum process apparatus facilitates heating of substrates and films, exposure of substrates and films to vapor with minimal vapor leakage, deposition of thin films onto substrates, and stripping thin films from substrates. A substrate transport apparatus permits the movement of substrates into and out of vacuum during thin film deposition processes, while preventing the collection of coatings on the substrate transport apparatus itself.
COPYRIGHT: (C)2010,JPO&INPIT
ENZENROTH ROBERT A
SAMPATH WALAJABAD S
ENZENROTH ROBERT A
SAMPATH WALAJABAD S
JP2002064215A | 2002-02-28 | |||
JPH0878355A | 1996-03-22 |
WO1997021252A1 | 1997-06-12 |
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