APPARATUS AND PROCESSES FOR MASS PRODUCTION OF PHOTOVOLTAIC MODULES

Title:

APPARATUS AND PROCESSES FOR MASS PRODUCTION OF PHOTOVOLTAIC MODULES

Document Type and Number:

Japanese Patent JP2010141343

Kind Code:

A

Abstract:

To provide an apparatus and process for large scale inline manufacturing of CdTe photovoltaic modules in which all steps, including rapid substrate heating, deposition of CdS, deposition of CdTe, CdCl2treatment, and ohmic contact formation, are performed within a single vacuum boundary at intermediate vacuum pressures.

A p+ ohmic contact region is formed by subliming a metal salt onto a CdTe layer. A back electrode is formed by way of a low cost spray process, and module scribing is performed by means of abrasive blasting or mechanical brushing through a mask. A vacuum process apparatus facilitates heating of substrates and films, exposure of substrates and films to vapor with minimal vapor leakage, deposition of thin films onto substrates, and stripping thin films from substrates. A substrate transport apparatus permits the movement of substrates into and out of vacuum during thin film deposition processes, while preventing the collection of coatings on the substrate transport apparatus itself.

Inventors:

BARTH KURT L
ENZENROTH ROBERT A
SAMPATH WALAJABAD S

Application Number:

JP2010010341A

Publication Date:

June 24, 2010

Filing Date:

January 20, 2010

Export Citation:

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Assignee:

BARTH KURT L
ENZENROTH ROBERT A
SAMPATH WALAJABAD S

International Classes:

H01L21/365; H01L31/04; C23C14/06; H01L21/203; H01L21/363; H01L31/18

Domestic Patent References:

JP2002064215A	2002-02-28
JPH0878355A	1996-03-22

Foreign References:

WO1997021252A1

1997-06-12

Attorney, Agent or Firm:

Nobuyuki Iida

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