Title:
APPARATUS FOR PULLING UP SINGLE CRYSTAL
Document Type and Number:
Japanese Patent JP2940439
Kind Code:
B2
Abstract:
PURPOSE: To obtain an apparatus for pulling up a single crystal capable of lessening the production of defective articles by the dislocation of the single crystal by falling of dust, improving productivity and reducing a cost.
CONSTITUTION: This apparatus is provided with a shielding plate 2 for opening and closing an inlet and outlet port 26 of a valve housing section 24 between a lower chamber 18 for housing a crucible 15, etc., and an upper chamber 22 for housing a wire 21 for pulling up the single crystal 19, etc. This shielding plate 2 is housed in the annular space part 5 within a wall 4 by an opening and closing means 3. An isolation valve 23 is protected by closing of the inlet and outlet port 26 by the shielding plate 2 and the shielding plate 2 is housed inside without contact with the inside surface of the wall 4 at the time of opening and, therefore, the falling of the dust to be induced by the peeling of the films deposited on the inside surface is prevented. The shielding plate 2 is housed into the annular space part 5 without exposing its rear and front surfaces.
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Inventors:
IINO EIICHI
TAKANO KYOTAKA
KIMURA MASAKI
MIZUISHI KOJI
YAMAGISHI HIROTOSHI
TAKANO KYOTAKA
KIMURA MASAKI
MIZUISHI KOJI
YAMAGISHI HIROTOSHI
Application Number:
JP16816495A
Publication Date:
August 25, 1999
Filing Date:
June 10, 1995
Export Citation:
Assignee:
SHINETSU HANDOTAI KK
International Classes:
C30B15/00; C30B15/14; C30B29/06; H01L21/208; (IPC1-7): C30B15/00; C30B29/06
Domestic Patent References:
| JP1246191A |