Title:
APPARATUS FOR PULLING UP SINGLE CRYSTAL
Document Type and Number:
Japanese Patent JPH04124085
Kind Code:
A
Abstract:
PURPOSE:To prevent the formation of polycrystalline region caused by the supply of raw material by suspending a cylindrical partition ring having non- uniform height of the lower edge in a crucible and dividing the crucible into a single crystal growth region and a granular raw material supply region, thereby uniformizing the concentration of dopant in the molten liquid. CONSTITUTION:A cylindrical partition ring 10 is suspended from a stationary frame 12 with a wire 13 into a crucible 2 supported by a crucible support 3. The lower edge of the partition ring 10 has non-uniform height, i.e. low at the raw material feeding side. The crucible 2 is divided into a single crystal growth region and a raw material supply region with the partition ring 10. The molten liquid 7 in the crucible 2 is heated with a heater 4, a single crystal 20 is pulled up with a wire 21 from the single crystal growth region and, at the same time, a granular raw material is supplied from a raw material hopper 8 through a supply pipe 9 to the raw material supply region.
Inventors:
NISHIZAKI KATSUMI
ECHIZENYA KAZUHIKO
KANEDA HIROSHI
SEKINE TERUYUKI
ECHIZENYA KAZUHIKO
KANEDA HIROSHI
SEKINE TERUYUKI
Application Number:
JP24121490A
Publication Date:
April 24, 1992
Filing Date:
September 13, 1990
Export Citation:
Assignee:
KAWASAKI STEEL CO
International Classes:
C30B15/02; C30B15/12; C30B29/06; (IPC1-7): C30B15/02; C30B15/12; C30B29/06
Attorney, Agent or Firm:
Yoshio Kosugi