To obtain an apparatus for refilling a cleaning solution which minimizes waste by using the cleaning solution effectively.

Respective liquid storage tanks 40 used for initial cleaning, intermediate cleaning, and finish cleaning are arranged, cleaning solution separation tanks 42 corresponding to the tanks 40 are installed, the tanks 40 and the tanks 42 are connected by connection pipes 45 to recover the cleaning solution from the tanks 40 to the tanks 42, supply pipes 47 are connected to supply the cleaning solution stored in the tanks 42 to the tanks 40, and a supply pipe 48 for supplying a new cleaning solution to the tank 40 for finish cleaning is installed. Besides, since the tank 40 for initial cleaning and the tank 42 are a cleaning solution refilling apparatus connected by the connection pipe 45, the cleaning solution with impurities removed can be used as the cleaning solution of a preliminary process so that the cleaning solution can be reused effectively. The amount of the new refilling cleaning solution can be reduced, and cleaning costs can be reduced. Moreover, the amount of the cleaning solution to be discarded is decreased to save the cleaning solution.