To stably and efficiently separate samples such as laminated substrates, etc.
A laminated substrate 101 sandwiched between substrate holders 120, 150 therebetween is pressed and held, and the laminated substrate 101 is separated by a jet applied from a nozzle 102 while rotating the laminated substrate 101. The substrate holders 120, 150 have first hold members 123, 153 for exactly regulating the position of the laminated substrate 101 in its thickness direction and second hold members 121, 151 for elastically pressing the laminated substrate 101. This constitution prevents the periphery of the laminated substrate 101 from vibrating, positional deviation in the surface direction, dropping, etc., and efficiently utilizes the pressure of water injected into the interior of the laminated substrate 101.
SAKAGUCHI KIYOBUMI
OMI KAZUAKI
YONEHARA TAKAO
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