Title:
多電極抽出源を使用する傾斜エッチングのための装置及び技法
Document Type and Number:
Japanese Patent JP7227373
Kind Code:
B2
Abstract:
A plasma source may include a plasma chamber, where the plasma chamber has a first side, defining a first plane and an extraction assembly, disposed adjacent to the side of the plasma chamber, where the extraction assembly includes at least two electrodes. A first electrode may be disposed immediately adjacent the side of the plasma chamber, wherein a second electrode defines a vertical displacement from the first electrode along a first direction, perpendicular to the first plane, wherein the first electrode comprises a first aperture, and the second electrode comprises a second aperture. The first aperture may define a lateral displacement from the second aperture along a second direction, parallel to the first plane, wherein the vertical displacement and the lateral displacement define a non-zero angle of inclination with respect to a perpendicular to the first plane.
Inventors:
Krunch, Peter F.
Evans, Morgan
Olson, Joseph Sea.
Evans, Morgan
Olson, Joseph Sea.
Application Number:
JP2021531910A
Publication Date:
February 21, 2023
Filing Date:
December 04, 2019
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/302; H01J27/02; H01J37/08; H01J37/147; H01J37/305
Domestic Patent References:
| JP2017533542A | ||||
| JP2012523120A | ||||
| JP63271856A | ||||
| JP2005055773A |
Foreign References:
| US20150255243 | ||||
| US20150311073 | ||||
| US20160035539 | ||||
| US20170178866 | ||||
| WO2018048566A1 |
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation
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