Title:
半導体基板またはその上に施こされた層をポリシングするための水性分散液およびその製造法
Document Type and Number:
Japanese Patent JP3990559
Kind Code:
B2
Abstract:
Aqueous dispersions comprises a cerium (Ce) oxide-doped pyrogenic silica, the Ce oxide having been obtained via an aerosol from a Ce salt solution or dispersion and the average particle diameter in the dispersion being below 100nm. An Independent claim is also included for the production of the dispersions by high-energy dispersion.
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Inventors:
Wolfgang Lortz
Christoph Butts-Zone
Gabriele Parlet
Wernerville
Christoph Butts-Zone
Gabriele Parlet
Wernerville
Application Number:
JP2001336247A
Publication Date:
October 17, 2007
Filing Date:
November 01, 2001
Export Citation:
Assignee:
Degussa GmbH
International Classes:
C01B33/141; C03B8/02; B01F23/00; C03B20/00; C03C19/00; C09C1/68; C09G1/02; C09K3/14; C09K23/00; D21H19/38; H01L21/306; H01L21/3105; H01L21/321
Domestic Patent References:
| JP9193004A | ||||
| JP10167717A |
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel