Title:
ARC CONFINING DEVICE OF VACUUM ARC VAPOR DEPOSITION DEVICE
Document Type and Number:
Japanese Patent JP3199587
Kind Code:
B2
Abstract:
PURPOSE: To prevent deposition of the evaporated matter from a bar-shaped target arranged in a perpendicular direction of a vapor deposition device having this target on arc confining bodies having approximately the same diameter by concentrically arranging these confining bodies in an electrically insulated state at the target described above.
CONSTITUTION: Substrates 3 to be treated are arranged to enclose the bar-shaped perpendicular target 2 arranged in a vacuum chamber 1 and an arc discharge is generated between the target 2 and the vacuum vessel 1 by a power source 4 to evaporate the surface of the target 2 and to deposit the target material on the substrates 2. In such a case, the ends of the target 2 are provided with the arc confining devices 6 which are fixed with metallic electrodes 8 and are arranged with the cylindrical arc confining bodies 13 having approximately the same diameter as the diameter of the target 2 in the insulated state from the target electrodes 8. The bottom end of the bar-shaped target 2 arranged perpendicularly is provided with an annular cover apart a specified spacing therefrom, by which the deposition of the evaporated matter of the target on the arc confining bodies 13 and the target 2 and electrical shorting of both are prevented and the working rate of the device is improved.
Inventors:
Takeshi Suzuki
Katsuhiko Shimojima
Katsuhiko Shimojima
Application Number:
JP30935194A
Publication Date:
August 20, 2001
Filing Date:
December 13, 1994
Export Citation:
Assignee:
KABUSHIKI KAISHA KOBE SEIKO SHO
International Classes:
C23C14/24; C23C14/32; (IPC1-7): C23C14/24
Domestic Patent References:
| JP4354863A | ||||
| JP5106025A | ||||
| JP2232364A | ||||
| JP219461A | ||||
| JP63223168A |
Attorney, Agent or Firm:
Toshio Yasuda