ARCHITECTURE FOR LARGE ACTIVE AREA HIGH-SPEED DETECTOR

Title:

ARCHITECTURE FOR LARGE ACTIVE AREA HIGH-SPEED DETECTOR

Document Type and Number:

Japanese Patent JP2023024560

Kind Code:

A

Abstract:

To disclose detectors and detection systems.SOLUTION: A substrate comprises a plurality of sensing elements (311-313) including a first plurality of sensing elements and a second plurality of sensing elements, and a plurality of sections (321-324) configured to connect the first plurality of sensing elements to an output, and connect the second plurality of sensing elements to an output. Switching regions configured to connect two or more sensing elements may be provided between the sensing elements. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy and/or beam intensity.SELECTED DRAWING: Figure 3

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Inventors:

Wang, Young Jin
Don zombie
Rye, Louis-Lin

Application Number:

JP2022201380A

Publication Date:

February 16, 2023

Filing Date:

December 16, 2022

Export Citation:

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Assignee:

ASM L Netherlands B.V.

International Classes:

H01J37/244

Attorney, Agent or Firm:

Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito

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