ARMATURE COIL FOR ELECTROMAGNETIC ACTUATOR, ELECTROMAGNETIC ACTUATOR, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

Title:

ARMATURE COIL FOR ELECTROMAGNETIC ACTUATOR, ELECTROMAGNETIC ACTUATOR, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

Document Type and Number:

Japanese Patent JP2018113854

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide an electromagnetic actuator armature coil capable of being downsized.SOLUTION: An armature coil 60 is provided that constitutes a stator of an X-axis linear motor and that generates a magnetic field by passing a current therethrough, the armature coil 60 comprises: a band-shaped electroconductive layer 62a that is made of copper and is wound around a prescribed winding axis; a band-shaped insulating layer 62b that is provided between opposing surfaces of the electroconductive layer 62a and electrically insulates opposing electroconductive layers 62a from one another; and a bonding layer 62c for bonding together the opposing surfaces of the electroconductive layers 62a via the insulating layer 62b.SELECTED DRAWING: Figure 4

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Inventors:

ITO AKIHIRO
KOKETSU MASAYUKI
MORIMOTO SHIGE
YOSHIMOTO HIROMITSU
TANAKA KOJI

Application Number:

JP2018019734A

Publication Date:

July 19, 2018

Filing Date:

February 07, 2018

Export Citation:

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Assignee:

CKD CORP
NIKON CORP

International Classes:

G03F7/20; H02K3/04; H01F7/20; H02K3/34; H02K33/00; H02K41/03

Attorney, Agent or Firm:

Atsushi Tateishi

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