Title:
ARTICLE CARRYING DEVICE AND METHOD
Document Type and Number:
Japanese Patent JPH10175186
Kind Code:
A
Abstract:
To provide a robot assembly carrying an article such as a substrate to a processing system.
A robot link device is provided for a multi-plane multi-arm robot assembly driven by two motors. The link device is driven by two magnetic retaining links 14 and 16. Alternatively, the link device is driven by three magnetic retaining links 14, 16 and 34, and two out of the aforesaid link are connected with a same motor. In both cases, the shuttle operation of each substrate can be made in such a way that paired substrates are taken out of a selected chamber by operating only the two motor with no rotation of the robot assembly during a carrying operation so as to be capable of being inserted therein again.
Inventors:
KROEKER TONY
MOORING BEN
MOORING BEN
Application Number:
JP22290997A
Publication Date:
June 30, 1998
Filing Date:
July 15, 1997
Export Citation:
Assignee:
APPLIED MATERIALS INC
International Classes:
B25J9/10; B25J15/08; H01L21/677; B65G49/07; (IPC1-7): B25J15/08; B65G49/07; H01L21/68
Attorney, Agent or Firm:
Minoru Nakamura (6 outside)