To provide a small atmosphere gas generating equipment which can effectively generate atmosphere gas including carbon monoxide, hydrogen and nitrogen at the value of high SV.
Atmosphere gas generating equipment 1 generates atmosphere gas 50 by reacting material gas 5. The atmosphere gas generating equipment 1 comprises a reaction cylinder 2 filled with platinum catalyst 21, a pair of surface combustion type package burner 3 arranged face to face with each other on the outside of the reaction cylinder 2 and a heating chamber 4 arranged between the reaction cylinder 2 and the both surface combustion type package burners 3. The surface combustion type package burner 3 is provided with a surface combustion plate 31 for surface combustion, a thermal storage/pre- heating chamber 32 for thermal storage and pre-heating of combustion mixed gas 61 arranged adjacently with the back surface of the surface combustion plate 31, and a mixing and exhausting chamber 33 for the introduction of the combustion mixed gas 61 and the exhaustion of combustion exhaust gas 63 arranged on the back surface of the thermal storage and pre-heating chamber 32.
SHIMIZU TOSHIHARU
KURAHASHI KAZUHIRO
INOUE NORIO
NAKANO MIKI
GOTO TAKASHI
NIKKI UNIVERSAL CO LTD
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