Title:
ATMOSPHERIC GLOW DISCHARGE PLASMA TREATMENT
Document Type and Number:
Japanese Patent JPH06285365
Kind Code:
A
Abstract:
PURPOSE: To provide the continuous atmospheric glow discharge plasma treatment of a material difficult to treat such as small-sized parts, irregularly-shaped small parts, powders and small-sized fibrous products.
CONSTITUTION: A material to be treated is placed in a plastic bag with the internal air replaced by a mixture of the rare gas and gaseous reactants and set between the parallel electrodes 1 and 2 present in the atmosphere, a high-frequency voltage is impressed on the electrodes 1 and 2 to produce atmospheric glow discharge plasma in the bag, and the material surface is made hydrophilic or hydrophobic.
Inventors:
UCHIYAMA HIROSHI
Application Number:
JP7811093A
Publication Date:
October 11, 1994
Filing Date:
April 05, 1993
Export Citation:
Assignee:
II C KAGAKU KK
International Classes:
B01J19/08; C23C16/50; D06M10/00; D06M10/02; H01L21/205; H01L21/302; H01L21/3065; H01L21/31; H05H1/46; D06M101/00; D06M101/02; D06M101/10; D06M101/12; (IPC1-7): B01J19/08; D06M10/00; H01L21/205; H01L21/31; H05H1/46
Attorney, Agent or Firm:
Hiroshi Tanaka (1 outside)
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