Title:
常圧乾燥装置及び基板処理装置及び基板処理方法
Document Type and Number:
Japanese Patent JP4384685
Kind Code:
B2
Inventors:
Fumihiko Ikeda
Hiro Nagata
Hiro Nagata
Application Number:
JP2007243563A
Publication Date:
December 16, 2009
Filing Date:
September 20, 2007
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027; F26B15/00; F26B15/12; G03F7/16
Domestic Patent References:
| JP2000106341A | ||||
| JP7283108A | ||||
| JP6310416A | ||||
| JP2007200994A | ||||
| JP2005263336A | ||||
| JP2007200993A |
Attorney, Agent or Firm:
Filial piety Sasaki