Title:
常圧プラズマ処理装置
Document Type and Number:
Japanese Patent JP4189255
Kind Code:
B2
Inventors:
Masaki Iwasaki
Kenzo Sano
Kenzo Sano
Application Number:
JP2003104380A
Publication Date:
December 03, 2008
Filing Date:
April 08, 2003
Export Citation:
Assignee:
Sekisui Chemical Co.,Ltd.
International Classes:
H05H1/24; B01J19/08; H01L21/3065
Domestic Patent References:
| JP2002266076A | ||||
| JP2000192261A | ||||
| JP2002094221A | ||||
| JP9092493A |