Title:
ATOMIC EMISSION SPECTROMETER FOR SURFACE MICROREGION
Document Type and Number:
Japanese Patent JP3866225
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an atomic emission spectrometer for a surface microregion capable of qualitatively and quantitatively analyzing elements, with a spatial resolution of a diameter of several nms and a depth of several nms.
SOLUTION: This atomic emission spectrometer for the surface microregion is constituted so that a probe 1, having a noble metal provided to the tip thereof, is allowed to approach the vicinity of the surface of a sample 6 to simultaneously irradiate the probe 1 and the surface of the sample 6, with a pulse laser 9 with a pico second, such as a pico second pulse Nd-YAG laser (355 nm, 266 nm) or a femto second pulse regenerative amplified Ti-sapphire laser (800 nm) and the sample atoms of the surface micro region are ablated, to perform not only qualitative analysis from the emission energy from excited atoms or ions, but also quantitative analysis from the emission quantity thereof.
Inventors:
Fujinami Maki
Shirota Shiro
Shirota Shiro
Application Number:
JP2003172836A
Publication Date:
January 10, 2007
Filing Date:
June 18, 2003
Export Citation:
Assignee:
Japan Science and Technology Agency
International Classes:
G01N21/63; G01Q30/02; G01Q60/24; G01Q60/38; (IPC1-7): G01N13/10; G01N13/16; G01N21/63
Domestic Patent References:
| JP7198610A | ||||
| JP888179A | ||||
| JP864170A | ||||
| JP2003270208A | ||||
| JP200081383A | ||||
| JP2004257973A |
Foreign References:
| US5479024 |
Other References:
Taesam Kim, et al,Compositional Mapping by Laser-Induced Breakdown Spectroscopy,J. Phys. Chem. B,1998年,Vol. 102, No. 22,p. 4284-4287
Attorney, Agent or Firm:
Mamoru Shimizu