To provide an atomic hydrogen generator which is easy to handle and is excellent in versatility.
The atomic hydrogen generator 11 is used in a treating apparatus using atomic hydrogen, which performs a surface treatment by bringing atomic hydrogen into contact with a material to be treated. The atomic hydrogen generator 11 generates atomic hydrogen from hydrogen gas and is composed of: a vessel 21 equipped with a generating chamber 21a for generating atomic hydrogen, an atomic hydrogen discharge port 21b for discharging generated atomic hydrogen, a gas feeding and exhausting port 21c, and a cassette inserting port 21d; and a heater cassette 12 in which a tungsten heater 25 and a collecting part 30 for collecting particulate foreign matter are unified. The heater cassette 12 can be freely attached to and detached from the inside of the vessel 21. Thereby, the atomic hydrogen generator easy to handle in maintenance and excellent in versatility can be realized.
ARITA KIYOSHI
MORISAKO ISAMU
Hiroki Naito
Daisuke Nagano
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