Title:
金属アミジナートを用いる原子層の析出
Document Type and Number:
Japanese Patent JP5714989
Kind Code:
B2
Abstract:
Metal films are deposited with uniform thickness and excellent step coverage. Copper metal films were deposited on heated substrates by the reaction of alternating doses of copper(I) NN'-diisopropylacetamidinate vapor and hydrogen gas. Cobalt metal films were deposited on heated substrates by the reaction of alternating doses of cobalt(II) bis(N,N'-diisopropylacetamidinate) vapor and hydrogen gas. Nitrides and oxides of these metals can be formed by replacing the hydrogen with ammonia or water vapor, respectively. The films have very uniform thickness and excellent step coverage in narrow holes. Suitable applications include electrical interconnects in microelectronics and magnetoresistant layers in magnetic information storage devices.
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Inventors:
Gordon, Roy Gee.
Rim, Boyon S.
Rim, Boyon S.
Application Number:
JP2011137554A
Publication Date:
May 07, 2015
Filing Date:
June 21, 2011
Export Citation:
Assignee:
PRESIDENT AND FELLOWS OFHARVARD COLLEGE
International Classes:
C07F1/08; C07F1/10; C07F5/00; C07F9/00; C07F15/02; C07F15/04; C07F15/06; C23C16/18; C23C16/34; C23C16/40; C23C16/455; H01L21/28; H01L21/285; H01L21/316; C23C16/44
Domestic Patent References:
| JP2010156058A | ||||
| JP2002069088A |
Foreign References:
| GB2295392A |
Other References:
VENDEMIATI,B. et al,Paramagnetic bis(amidinate) iron(II) complexes and their diamagnetic dicarbonyl derivatives,European Journal of Inorganic Chemistry,2001年,No.3,p.707-711
VAN,V.P. et al,Metal-metal bonded compounds. IV. Stabilization of metal-metal bonding by bridging asymmetric form,Journal of Organometallic Chemistry,1979年,Vol.182, No.1,p.105-15
化学大辞典2,共立出版株式会社,1960年 6月30日,初版,第1刷,第180-181頁
SADIQUE,A.R. et al,Monomeric and Dimeric Amidinate Complexes of Magnesium,Inorganic Chemistry,2001年,Vol.40, No.25,p.6349-6355
DIONNE,M. et al,Preparation and characterization of a new series of Cr(II) hydroborates,Canadian Journal of Chemistry,1995年,Vol.73, No.7,p.1126-34
VAN,V.P. et al,Metal-metal bonded compounds. IV. Stabilization of metal-metal bonding by bridging asymmetric form,Journal of Organometallic Chemistry,1979年,Vol.182, No.1,p.105-15
化学大辞典2,共立出版株式会社,1960年 6月30日,初版,第1刷,第180-181頁
SADIQUE,A.R. et al,Monomeric and Dimeric Amidinate Complexes of Magnesium,Inorganic Chemistry,2001年,Vol.40, No.25,p.6349-6355
DIONNE,M. et al,Preparation and characterization of a new series of Cr(II) hydroborates,Canadian Journal of Chemistry,1995年,Vol.73, No.7,p.1126-34
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Koji Takeuchi
Takashi Ishida
Tetsuji Koga
Koji Takeuchi