Title:
ATTACHMENT OF NANO-OBJECTS TO BEAM-DEPOSITED STRUCTURES
Document Type and Number:
Japanese Patent JP2017203771
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a system of attaching nano-objects to a surface at precise locations.SOLUTION: Beam-induced deposition decomposes a precursor at precise positions on a surface. The surface is processed to provide linker groups on the surface of the deposit, and the sample is processed to attach nano-objects to the linker groups. The nano-objects are used in a variety of application. When a charged particle beam is used to decompose the precursor, the charged particle beam can be used to form an image of the surface with the nano-objects attached thereto.SELECTED DRAWING: Figure 4
Inventors:
MEHRAN KIANINIA
OLGA SHIMONI
IGOR AHARONOVICH
LOBO CHARLENE
TOTH MILOS
RANDOLPH STEVEN
CHANDLER CLIVE D
OLGA SHIMONI
IGOR AHARONOVICH
LOBO CHARLENE
TOTH MILOS
RANDOLPH STEVEN
CHANDLER CLIVE D
Application Number:
JP2017090900A
Publication Date:
November 16, 2017
Filing Date:
April 30, 2017
Export Citation:
Assignee:
FEI CO
International Classes:
G01N1/28; G01N33/543; H01J37/305; H01J37/317
Domestic Patent References:
| JP2008190937A | 2008-08-21 | |||
| JP2017502647A | 2017-01-26 | |||
| JP2015116659A | 2015-06-25 | |||
| JP2017101316A | 2017-06-08 | |||
| JP2005310757A | 2005-11-04 | |||
| JP2005305598A | 2005-11-04 | |||
| JP2013219203A | 2013-10-24 | |||
| JP2009155111A | 2009-07-16 | |||
| JP2003114182A | 2003-04-18 | |||
| JP2012502427A | 2012-01-26 |
Foreign References:
| US20080038830A1 | 2008-02-14 | |||
| WO2006043656A1 | 2006-04-27 | |||
| US20090078914A1 | 2009-03-26 |
Other References:
WINAND SLINGENBERGH: "Selective Functionalization of Tailored Nanostructures", ACS NANO, vol. 6, no. 10, JPN6021001842, 20 September 2012 (2012-09-20), pages 9214 - 9220, ISSN: 0004583330
Attorney, Agent or Firm:
Masahiko Amagai