To provide an attraction force offset type linear motor which is excellent in cooling performance regardless of traveling directions in the case that a linear motor is applied to an XY stage traveling within a plane in XY axial direction.
In a rotor 7 of this attraction force offset type linear motor, a fin surface area is increased by attaching a heat sink 30 having pin fins 31, which can effectively cool the motor regardless of motor traveling direction. A cooling fan 12 for introducing cooling air is attached to the top of the pin fin 31, and a cover 13 for preventing leakage of cooling air from the top end of the pin fin 31 is attached onto an outer periphery near its top end, by which large radiation can be obtained even during stopping the linear motor. With a cooling fan 12 attached, the cover 13 is attached to the pin fin 31 to prevent leakage of the cooling wind from the top end of the pin fin 31, thus realizing effective cooling.
YAMADA TAKASHI
MIYAMOTO TADAHIRO
FUJII TAKAO
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