Title:
オートフォーカス装置
Document Type and Number:
Japanese Patent JP5189966
Kind Code:
B2
Abstract:
An autofocus device includes an objective lens, an observation optical system, a driving mechanism that displaces the objective lens in an optical axis direction thereof, an illumination-optical-system optical path used to illuminate a measurement surface of a measurement object through the objective lens with light, and a pattern-projection-optical-system optical path. An electronic control shutter, a pattern projection plate having a predetermined pattern formed thereon, and a projection lens are provided in the pattern-projection-optical-system optical path.
Inventors:
Tatsuya Nagahama
Kenji Okabe
Sadayuki Matsumiya
Kenji Okabe
Sadayuki Matsumiya
Application Number:
JP2008304779A
Publication Date:
April 24, 2013
Filing Date:
November 28, 2008
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G02B7/28; G02B7/36; G02B21/00; H04N5/232
Domestic Patent References:
| JP7244240A | ||||
| JP2000089363A | ||||
| JP2300707A | ||||
| JP8075980A | ||||
| JP4326342A | ||||
| JP2001296469A |
Attorney, Agent or Firm:
Intellectual Property Office