Title:
AUTOMATED OPTICAL INSPECTION INSTRUMENT EQUIPPED WITH ADJUSTABLE COMBINATION OF IMAGE ACQUISITION, AND ADJUSTMENT METHOD FOR COMBINATION OF IMAGE ACQUISITION
Document Type and Number:
Japanese Patent JP2020052041
Kind Code:
A
Abstract:
To provide an automated optical inspection (AOI) instrument that is equipped with an adjustable combination of an image acquisition, and to provide an adjustment method for combination of the image acquisition.SOLUTION: An automated optical inspection instrument includes: at least one image acquisition device; at least one movable light source; and a movement mechanism of a device under test (DUT). A control circuit is configured to move the DUT; select the one light source; and control the light source to move or rotate the light source. The control circuit is capable of implementing an acquisition action by sequentially replacing a plurality of combinations of image acquisition. Respective combinations of the image acquisition are configured to record the image acquisition device, a position and angle of the DUT, the light source and a position and angle of the light source with respect to the DUT. A position or angle of the acquisition combination is different. Accordingly, many image acquisition results can be quickly and automatically acquired with respect to the DUT.SELECTED DRAWING: Figure 2
Inventors:
LIN CHYI-YEU
HE JIAN QIAO
HE JIAN QIAO
Application Number:
JP2019167971A
Publication Date:
April 02, 2020
Filing Date:
September 17, 2019
Export Citation:
Assignee:
CENZ AUTOMATION CO LTD
International Classes:
G01N21/88; G03B15/00; G03B15/02; H01L21/66; H04N5/225; H04N5/232
Domestic Patent References:
| JP2010025597A | 2010-02-04 | |||
| JP2006118896A | 2006-05-11 | |||
| JP2003270163A | 2003-09-25 |
Foreign References:
| CN108089600A | 2018-05-29 |
Attorney, Agent or Firm:
Kiuchi Mitsuharu
Koichi Okuma
Katagiri Sadanori
Kanako Kiuchi
Koichi Okuma
Katagiri Sadanori
Kanako Kiuchi