Title:
Automatic check scenario generation
Document Type and Number:
Japanese Patent JP6280118
Kind Code:
B2
Abstract:
Methods and systems for determining inspection scenarios without input from a user are presented. Inspection scenarios include at least one acquisition mode, defect detection parameter values, and classification parameter values. In one example, a number of defect events are determined by a hot inspection of a wafer surface. The defect events are classified and attributes associated with each defect event are identified. The defect events are labeled with this information. Based on the identified attributes and classification, inspection scenarios are determined. The inspection scenarios are solutions in a mathematical space formed by the identified attributes. In some examples, a plurality of inspection scenarios are determined and a desired inspection scenario is selected from the plurality based on the number of defects of interest and the number of nuisance events captured by the selected inspection scenario.
Inventors:
Mahadevan Mohan
Thattai Sandalam Govind
Gupta Ajay
Chiang Chien-Fay (Adam)
Kirkwood Jason
Kurkarni Ashok
Ron Sonnian
Escorcia Ernesto
Sifrin Eugene
Thattai Sandalam Govind
Gupta Ajay
Chiang Chien-Fay (Adam)
Kirkwood Jason
Kurkarni Ashok
Ron Sonnian
Escorcia Ernesto
Sifrin Eugene
Application Number:
JP2015527542A
Publication Date:
February 14, 2018
Filing Date:
August 13, 2013
Export Citation:
Assignee:
KLA-Tenker Corporation
International Classes:
H01L21/66
Domestic Patent References:
| JP2005017159A | ||||
| JP2002303586A |
Foreign References:
| WO2012005863A2 |
Attorney, Agent or Firm:
Patent Corporation yki International Patent Office