Title:
AUTOMATIC LIQUID CONTROL DEVICE
Document Type and Number:
Japanese Patent JPH05129198
Kind Code:
A
Abstract:
PURPOSE: To provide an automatic liquid control device allowing to correctly measure an effective component of resist separating liquid.
CONSTITUTION: A heating means 53 heating resist separating liquid sampled by a sampling means 51 is provided on the first part of a detecting means 54, a temperature of the resist separating liquid is made to rise up to a region allowing stable measurement of an effective component, for instance, not exceeding 65°C by this heating means 53, and thereby, the generation of an intermediate substance regarded as an unstable element at the time of measuring the effective component is prevented.
Inventors:
TAKAIWA SATOSHI
Application Number:
JP13145891A
Publication Date:
May 25, 1993
Filing Date:
June 03, 1991
Export Citation:
Assignee:
TOKICO LTD
International Classes:
B01L99/00; G03F7/30; G05D11/13; H01L21/027; H01L21/30; (IPC1-7): B01L11/00; G03F7/30; G05D11/13; H01L21/027
Attorney, Agent or Firm:
Masatake Shiga (2 outside)