PURPOSE: To meet a user's need to inspect the same lot again following a first inspection and completely automate handling of to-be-inspected devices when the semiconductor devices are inspected by a semiconductor testing apparatus.

CONSTITUTION: When a tram arm 11 handling a to-be-inspected device from an unloader stocker part 24 to a loader stocker part 23 is used, an automatic re-inspection is set at a step 1 on a display screen 8 of a control part of a semiconductor testing apparatus. After a handler is started at a step 2 and a lot is finished to be inspected for the first time at a step 3, the setting of the automatic re-inspection is confirmed at a step 4. When the re-inspection is started at a step 5, the tram arm 1 carries the device in the unloader stocker part 24 designated to be re-inspected to the loader stocker part 23. The device is inspected again in the same sequence as at the first time.