Title:
AUTOMATIC TEACHING METHOD FOR WAFER AUTOMATIC TRANSFERRING MACHINE
Document Type and Number:
Japanese Patent JPH08222620
Kind Code:
A
Abstract:
PURPOSE: To provide a method for automatically teaching a wafer automatic transferring machine in which the teaching operation by an operator can be automated.
CONSTITUTION: A method for transferring a wafer 3 by a wafer automatic transferring machine 4 between a cassette 1 and a boat 2 comprises the steps of detecting the positions of the cassette 1 and a reference wafer 3A placed in the boat 2 by sensors 5 and 7, measuring the coordinates of the wafer 3A and tweezers 6 for holding and transferring the wafer 3A from data output from an encoder at the timing of ON and OFF, and automatically correcting the shifting amount from the previous data, thereby automatically teaching.
More Like This:
| JP3735895 | TRANSPORT CONTROL SYSTEM |
| WO2004067411 | APPARATUS AND METHOD FOR FILLING TRAYS |
Inventors:
TOMEZUKA KOJI
TAKAKUWA YASUNORI
SHINO KAZUHIRO
TAKAKUWA YASUNORI
SHINO KAZUHIRO
Application Number:
JP2242395A
Publication Date:
August 30, 1996
Filing Date:
February 10, 1995
Export Citation:
Assignee:
KOKUSAI ELECTRIC CO LTD
International Classes:
B65G1/00; H01L21/205; H01L21/22; H01L21/67; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B65G1/00; H01L21/205; H01L21/22
Attorney, Agent or Firm:
Ishido
Previous Patent: MANUFACTURE OF SEMICONDUCTOR
Next Patent: POSITIONING UNIT FOR CIRCULAR SUBSTRATE AND POSITIONING METHOD THEREFOR
Next Patent: POSITIONING UNIT FOR CIRCULAR SUBSTRATE AND POSITIONING METHOD THEREFOR