Title:
AZEOTROPIC SOLVENT COMPOSITION
Document Type and Number:
Japanese Patent JPH01165697
Kind Code:
A
Abstract:
PURPOSE:To improve the wax detergency of chlorofluorocarbon-113 and, at the same time, to lower the amt. of use thereof, by mixing 1,1,2-triochloro-1,2,2- trifluoroethane with dimethoxymethane in a particular proportion. CONSTITUTION:This azeotropic solvent compsn. comprises 42wt.% 1,1,2- triochloro-1,2,2-trifluoroethane (chlorofluorocarbon-113) and 58wt.% dimethoxymethane. Although this compsn. is relatively chemically stable, it is possible to further add a stabilizer. It is pref. that the stabilizer be removed or form an azeotropic compsn. in the course of distillation. Examples of the stabilizer include nitromethane and 3-methyl-1-butyne. The azeotropic solvent compsn. is useful as a detergent for removing fat or grease, removing wax used in temporary fixation for working such as cutting or polishing of silicon wafer, quartz, ceramics or the like used for semiconductors, and removing a release agent of a photoresist.
Inventors:
TAMURA KOJI
OMURE YUKIO
IDE SATORU
HANATANI NAOMI
FUKUZAWA HISAMASA
OMURE YUKIO
IDE SATORU
HANATANI NAOMI
FUKUZAWA HISAMASA
Application Number:
JP32492887A
Publication Date:
June 29, 1989
Filing Date:
December 22, 1987
Export Citation:
Assignee:
DAIKIN IND LTD
International Classes:
C07C19/12; C07C17/00; C07C17/42; C07C67/00; C11D7/50; C23G5/028; C23G5/032; G03F7/42; (IPC1-7): C07C17/42; C07C19/08; C11D7/50; C23G5/028; C23G5/032; G03C11/00; G03F7/00
Attorney, Agent or Firm:
Sota Asahina (1 person outside)