To execute internal diameter simultaneous inspection to a plurality of hole parts to be inspected on a workpiece, simultaneously by a single measuring head, and to thereby improve efficiency.
A plurality of lateral passages y1-y9 crossing a head S at intervals in the axial direction, and a plurality of longitudinal passages t1-t9 each inner end of which is opened to the longitudinal passages and each outer end of which is extended linearly along the axial direction up to the end face of the head S are formed on the measuring head S so that both ends are opened to a head outer peripheral surface corresponding to the plurality of hole parts h1-h9 to be inspected. The plurality of longitudinal passages t1-t9 are arranged circularly at intervals mutually in the circumferential direction in view of a projection surface orthogonal to the axis of the head S, and the plurality of lateral passages y1-y9 are extended linearly along a plurality of different diameter lines connecting the center of each hole Wh to the plurality of longitudinal passages t1-t9 respectively in view of the projection surface, and further the measuring head S is provided with a compressed air introduction means SA for blocking each outer end of the longitudinal passages t1-t9 from the outside air and connecting it individually with a plurality of air pipes L1-L9.
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Kazuaki Niki
Nude Shima Shinji
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