Title:
狭帯域化モジュール、ガスレーザ装置、及び電子デバイスの製造方法
Document Type and Number:
Japanese Patent JP7275248
Kind Code:
B2
Abstract:
A line narrowing module includes a prism including an entrance side surface that light enters, an exit side surface from which the light is emitted, and a bottom surface, and configured to wavelength-disperse the light having entered the entrance side surface and to emit the light from the exit side surface; a holder portion having a stationary surface on which the bottom surface of the prism is secured; a rotary mechanism portion including a rotary stage on which the holder portion is secured, the rotary stage being configured to rotate the prism around an axis perpendicular to a dispersion plane of the light emitted from the prism; a drive unit configured to rotate the rotary stage; and a grating configured to reflect the light emitted from the prism, centroids of the prism, the holder portion, and the rotary stage being located on the axis.
Inventors:
Miwa Igarashi
Application Number:
JP2021501433A
Publication Date:
May 17, 2023
Filing Date:
February 26, 2019
Export Citation:
Assignee:
Gigaphoton Inc.
International Classes:
H01S3/137
Domestic Patent References:
| JP2015175611A | ||||
| JP4129119U | ||||
| JP6004893A | ||||
| JP5096911U | ||||
| JP2007201121A | ||||
| JP2001350006A | ||||
| JP2005352037A |
Foreign References:
| US20180107017 | ||||
| WO2018061098A1 | ||||
| WO2018061210A1 |
Attorney, Agent or Firm:
Yasuo Morimura