Barium silicified laminate and its manufacturing method

Title:

Barium silicified laminate and its manufacturing method

Document Type and Number:

Japanese Patent JP6347041

Kind Code:

B2

Inventors:

Goto Kuramochi
Masami Sumida
Takashi Suemasu

Application Number:

JP2014169115A

Publication Date:

June 27, 2018

Filing Date:

August 22, 2014

Export Citation:

Assignee:

Tosoh Corporation
University of Tsukuba

International Classes:

C23C14/06; B32B15/04; B32B18/00; H01L21/363

Domestic Patent References:

Attorney, Agent or Firm:

Kenji Izumina
Toshiharu Ogawa

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