BASE TREATING APPARATUS - DAINIPPON SCREEN MFG

Title:

BASE TREATING APPARATUS

Document Type and Number:

Japanese Patent JP2000070873

Kind Code:

A

Abstract:

To prevent a cleaning liq. from falling flop on the top face of a base from a liq. outlet after the cleaning liq. is stopped to be fed.

In this apparatus, after cleaning treatment is performed by feeding a cleaning liq. on the top face of a base W from a liq. outlet 41 at the apex of a top part cleaning liq. feeding pipe 40 arranged above the base W held by means of a spin chuck 1, drying treatment for drying the base W is performed under a condition where the base W is held by means of the spin chuck 1. In this case, at least a liq. flow path part 43 on the liq. outlet 41 side of the top part cleaning liq. feeding pipe 40 is divided into a plurality of liq. flow paths 44 and the cleaning liq. is fed on the top face of the base W through a plurality of these liq. flow paths 44.

Inventors:

ADACHI HIDEKI
IZUMI AKIRA
KAMIYAMA TSUTOMU

Application Number:

JP24165698A

Publication Date:

March 07, 2000

Filing Date:

August 27, 1998

Export Citation:

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Assignee:

DAINIPPON SCREEN MFG

International Classes:

B08B3/02; H01L21/304; (IPC1-7): B08B3/02; H01L21/304

Attorney, Agent or Firm:

Tsutomu Sugitani

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