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Title:
BASKET HOUSING EQUIPMENT
Document Type and Number:
Japanese Patent JPS5682705
Kind Code:
A
Abstract:

PURPOSE: To automate housing and taking-out to and from baskets for semiconductor substrates or the like to highly improve work efficiency, by sequentially lifting the baskets brought by a conveyor, to perform housing and holding.

CONSTITUTION: When a basket 5 is carried into between annular rails 3, 4 in the direction of an arrow 14 by a conveyor 13, this conveyor is stopped and drive wheels 5, 6 are rotated in the directions of arrows 15, 16 by drivers 11, 12 to move the annular rails 3, 4 in the directions of arrows 17, 18. At that time, the holding members 9, 10 of the annular rails 3, 4 are driven together, upper holding members 9a, 10a are engaged with the bottoms of lugs 19, 20 provided on the tops of both the sides of the basket 2 on the conveyor 13 and the basket 2 is lifted by a prescribed height above the conveyor 13. The baskets 2 are thus vertically housed and held between the annular rails 3, 4.


Inventors:
ITE MICHIFUMI
Application Number:
JP15850379A
Publication Date:
July 06, 1981
Filing Date:
December 05, 1979
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
B65G57/30; B65G1/06; B65G1/07; (IPC1-7): B65G1/06; B65G57/30



 
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