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Title:
BEAM CROSS-SECTION IMAGE RECONFIGURATION AND DISPLAY DEVICE
Document Type and Number:
Japanese Patent JPH04265889
Kind Code:
A
Abstract:

PURPOSE: To display a beam cross-section image which can be inferred easily by reconfiguring a beam integration pattern which is measured by a profile monitor and then displaying an obtained two-dimensional beam section image.

CONSTITUTION: A data indicating an integration pattern of a beam 30 which is measured by a three-line type profile monitor 20 is supplied to a beam section image reconfiguration and display device 10. Namely, a head 22 is driven by an air cylinder 21 so that wires 22x-22z scan a section of the beam 30 within a measurement plane 31 which is vertical to an irradiation direction of the beam 30, thus enabling an integration pattern of beam current in three directions to be measured. A signal indicating the beam current integration pattern in three directions from the monitor 20 is supplied to the device 10. Then, in the device 10, a section image within the measurement plane 31 which is vertical to the irradiation direction of the beam 30 is reconfigured by a neural network 11 and the section image of the beam 30 is displayed on a CRT display 40.


Inventors:
OKAMURA TETSUYA
Application Number:
JP4566891A
Publication Date:
September 22, 1992
Filing Date:
February 20, 1991
Export Citation:
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Assignee:
SUMITOMO HEAVY INDUSTRIES
International Classes:
G01T1/29; G06F15/18; G06N3/00; G06N99/00; H05H7/00; (IPC1-7): G01T1/29; G06F15/18; H05H7/00
Attorney, Agent or Firm:
Yosuke Goto (2 outside)