Title:
ビームホモジェナイザ
Document Type and Number:
Japanese Patent JP4951670
Kind Code:
B2
Abstract:
A beam homogenizer that minimizes undesired intensity variations at the output plane caused by sharp breaks between facets in previous embodiments. The homogenizer includes a hologram made up of irregularly patterned diffractive fringes. An input beam illuminates at least part of the hologram. The hologram transmits a portion of the input beam onto an output plane. In doing so, the energy of the input beam is spatially redistributed at the output plane into a homogenized output beam having a preselected spatial energy distribution at the output plane. Thus, the illuminated portion of the output plane has a shape predetermined by the designer of the homogenizer.
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Inventors:
Alan Di Casman
Michael Earl Feldman
Michael Earl Feldman
Application Number:
JP2009292936A
Publication Date:
June 13, 2012
Filing Date:
December 24, 2009
Export Citation:
Assignee:
DigitalOptics Corporation East
International Classes:
H01L21/027; B23K26/06; G02B5/02; G02B5/18; G02B5/32; G02B27/09; G02F1/01; G03F7/20; G03H1/08; H04B10/04
Domestic Patent References:
| JP4787944B2 | ||||
| JP8094839A | ||||
| JP7509572A | ||||
| JP8512003A | ||||
| JP4299303A | ||||
| JP7283133A |
Foreign References:
| FR2716726A1 | ||||
| EP0744664A1 | ||||
| US4547037 | ||||
| US5534386 |
Other References:
OPTICS LETTERS Vol.14 No.10(1989) p.479-481
J. Opt. Soc. Am. A Vol.7 No.6(1990) p.961-969
J. Opt. Soc. Am. A Vol.6 No.8(1989) p.1171-1174
J. Opt. Soc. Am. A Vol.7 No.6(1990) p.961-969
J. Opt. Soc. Am. A Vol.6 No.8(1989) p.1171-1174
Attorney, Agent or Firm:
Takuji Yamada
Mitsuo Tanaka
Mitsuo Tanaka