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Title:
BEAM POSITION DETECTOR
Document Type and Number:
Japanese Patent JPH0493686
Kind Code:
A
Abstract:

PURPOSE: To increase the extent of position detecting sensitivity by installing a fluorescent X-ray radiator on an optical axis of synchrotron radiation light, detecting the fluorescent X-ray being emitted with two detectors each, and finding a beam position from each output signal.

CONSTITUTION: A copper rod 1 or a fluorescent X-ray radiator makes an angle on an optical axis acute with a triangular section doubling as a linear symmetry to the optical axis of synchrotron radiation light correctly irradiates the copper rod 1 without entailing any dislocation, each quantity of both first and second fluorescent X-rays being detected by first and second detectors 2, 3 is the same, so that each of output signals (a), (b) of these two detectors 2, 3 becomes equalized. Accordingly, with an output signal out of an arithmetic circuit 4 monitored, a beam position of the synchrotron radiation light is accurately detectable.


Inventors:
MIYAKE AKIRA
AMAMIYA MITSUAKI
WATANABE YUTAKA
Application Number:
JP20670790A
Publication Date:
March 26, 1992
Filing Date:
August 06, 1990
Export Citation:
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Assignee:
CANON KK
International Classes:
G01J1/00; G01J1/02; G01T1/29; (IPC1-7): G01J1/00; G01J1/02; G01T1/29
Attorney, Agent or Firm:
Wakabayashi Tadashi



 
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