Title:
球面軸受の軸受半径決定方法
Document Type and Number:
Japanese Patent JP7287761
Kind Code:
B2
Abstract:
A coupling mechanism capable of preventing vibration of a rotating body from occurring due to a lower-bearing friction torque is disclosed. The coupling mechanism includes an upper spherical bearing and a lower spherical bearing disposed between a drive shaft and a rotating body. The upper spherical bearing has a first concave contact surface and a second convex contact surface, and the lower spherical bearing has a third concave contact surface and a fourth convex contact surface. The first concave contact surface, the second convex contact surface, the third concave contact surface, and the fourth convex contact surface are arranged concentrically. A lower-bearing radius of the lower spherical bearing is determined so that a lower-restoring torque is equal to or less than 0, the lower-restoring torque being the sum of a rotating-body friction torque generated in the rotating body due to a rotating-body frictional force between a polishing pad and the rotating body, and a lower-bearing friction torque generated in the rotating body due to a frictional force between the third concave contact surface and the fourth convex contact surface.
Inventors:
Hiroyuki Shinozaki
Application Number:
JP2018143393A
Publication Date:
June 06, 2023
Filing Date:
July 31, 2018
Export Citation:
Assignee:
Ebara Corporation
International Classes:
B24B53/017; B24B37/30; B24B53/00; B24B53/12; H01L21/304
Domestic Patent References:
| JP2016144860A |
Attorney, Agent or Firm:
Tetsuya Hirosawa
Isamu Watanabe
Goto Manabu
Mitsuhiro Kanazawa
Isamu Watanabe
Goto Manabu
Mitsuhiro Kanazawa