To provide a biaxial yaw rate sensor capable of reducing the manufacturing cost by providing the sensor with a structure where the number of parts is reduced, and its manufacturing method.

A PZT thin film for vibrating in the diameter direction of a vibration ring 15 is formed on drive surfaces 16a-16d being arranged in four directions of the vibration ring 15 that is supported by a ring support plate 11, and drive electrode films 19a-19d are provided on the PZT thin film of the drive surfaces 16a-16d. A mass 21 is arranged on the drive surfaces 16a-16d in a direction for orthogonally crossing the vibration direction of the drive surface 16a-16d via a second connection part 22. A PZT thin film is arranged at the second connection part 22. Detection electrode films 24a-24d are provided on the PZT thin film.