Title:
ブレード固定装置及びダイシング装置
Document Type and Number:
Japanese Patent JP7029625
Kind Code:
B2
Abstract:
To provide a blade fixing device and a dicing device capable of preventing meandering of a dicing blade with respect to a workpiece by suppressing the swing of the dicing blade, even for the dicing blade in which a protrusion amount in the radial direction from a holding member is large just like a hubless blade.SOLUTION: A flange surface 44G includes a surface 44I as an inclined surface which is gradually separated from a side surface 10C of a dicing blade 10, toward a center 10F of the dicing blade 10. Likewise, a flange surface 46G includes a surface 46I as an inclined surface which is gradually separated from a side surface 10D of the dicing blade 10, toward the center 10F of the dicing blade 10.SELECTED DRAWING: Figure 7
Inventors:
Yusuke Arai
Application Number:
JP2021027116A
Publication Date:
March 04, 2022
Filing Date:
February 24, 2021
Export Citation:
Assignee:
Tokyo Seimitsu Co., Ltd.
International Classes:
B24B45/00; B24B27/06; H01L21/301
Domestic Patent References:
| JP2017024093A | ||||
| JP56163882A |
Attorney, Agent or Firm:
Kenzo Matsuura
Kazuki Ohara
Kiyoshi Matsumura
Constitutional Matsuura
Kazuki Ohara
Kiyoshi Matsumura
Constitutional Matsuura