Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
ブレード保持治具、切削装置、及び、切削ブレードの装着方法
Document Type and Number:
Japanese Patent JP7451039
Kind Code:
B2
Abstract:
A blade holding jig for holding a washer-type cutting blade via an annular retainer flange includes an annular flange holding portion configured to hold a first annular surface of the retainer flange under suction, and an annular non-contact suction portion arranged on an outer peripheral portion of the flange holding portion and configured to produce a negative pressure by ejection of a fluid toward the outer peripheral portion of the retainer flange held by the flange holding portion and to draw up the cutting blade toward the retainer flange. The cutting blade drawn up toward the retainer flange by the non-contact suction portion is held on the retainer flange by a suction force acting from the flange holding portion via a plurality of through holes disposed extending from a second annular surface to the first annular surface of the retainer flange.

Inventors:
Su Shihiro
Kazuki Terada
Kenichi Fujie
Application Number:
JP2020070793A
Publication Date:
March 18, 2024
Filing Date:
April 10, 2020
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
Disco Co., Ltd.
International Classes:
B24B45/00; B23B31/00; B23B31/02; B23Q17/00; B24B27/06; H01L21/301
Domestic Patent References:
JP2016064450A
JP2019013988A
JP2010284774A
JP2018181266A
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano